An investigation of methods of evaluating plasma etch damage on silicon

In Collections: Electronic Theses & Dissertations

Copyright Status: In Copyright

Material Type: Theses

Authors: Gopinath, Venkatesh P.

Date Published: 1991

Subjects: Silicon

Program of Study: Electrical Engineering

Degree Level: Masters

Language: English

Pages: viii, 86 pages

Permalink: https://doi.org/doi:10.25335/2emx-2c86

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