MSU Libraries
Digital Repository
Home
About
Collections
Selected facets
Collection: Electronic Theses & Dissertations
×
Program of Study: Electrical and Computer Engineering
×
Subject: Microwave plasmas
×
Material Type
Theses
5
Language
English
5
Copyright Status
In Copyright
5
Subject
Chemical vapor deposition
1
Diamond thin films
3
Electromagnetic measurements
1
Interfaces (Physical sciences)
1
Nanodiamonds
1
Photoemission
1
Plasma engineering
1
Plasma-enhanced chemical vapor deposition
1
Radio waves
1
Semiconductors--Design and construction
1
Thick films
1
Search results
Showing 1 to 5 of 5 results
Results per page
20
50
100
Sort by
Most Relevant
Title (A-Z)
Title (Z-A)
Date (Newest)
Date (Oldest)
Most Recent
Least Relevant
Microwave plasma assisted chemical vapor deposition of ultra-nanocrystalline diamond films
Huang, Wen-Shin
Text (2004)
Part of
Electronic Theses & Dissertations
Optical emission spectroscopy investigation of microwave plasmas
Sivagnaname, Jayakumaran
Text (1998)
Part of
Electronic Theses & Dissertations
Investigation of a 17.8 cm diameter end feed microwave cavity plasma source wtih and without a static magnetic field
Perrin, Mark Alan
Text (2002)
Part of
Electronic Theses & Dissertations
Synthesis of thin and thick ultra-nanocrystalline diamond films by microwave plasma CVD systems
Tran, Dzung Tri
Text (2005)
Part of
Electronic Theses & Dissertations
Improved utility of microwave energy for semiconductor plasma processing through RF system stability analysis and enhancement
Rummel, Paul
Text (2000)
Part of
Electronic Theses & Dissertations
First
1
(current)
Last