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Copyright Status: In Copyright
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Language: English
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Degree Level: Doctoral
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Subject: Cyclotron resonance
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Subject: Plasma etching
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Collection
Electronic Theses & Dissertations
2
Material Type
Theses
2
Subject
Microwave plasmas
1
Silicon
1
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Macroscopic properties of a multipolar electron cyclotron resonance microwave-cavity plasma source for anisotropic silicon etching
Hopwood, Jeffrey Alan
Text (1990)
Part of
Electronic Theses & Dissertations
An experimental evaluation of a 12.5-cm diameter multipolar microwave electron cyclotron resonance plasma source
Mak, Peng Un
Text (1997)
Part of
Electronic Theses & Dissertations
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