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Copyright Status: In Copyright
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Program of Study: Electrical Engineering
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Subject: Diamonds
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Subject: Microwave plasmas
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Collection
Electronic Theses & Dissertations
3
Material Type
Theses
3
Language
English
3
Subject
Chemical vapor deposition
1
Microelectronics industry
1
Plasma etching
2
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Experimental development of microwave cavity plasma reactors for large area and high rate diamond film deposition
Zhang, Jie
Text (1993)
Part of
Electronic Theses & Dissertations
Post-depositional processing of diamond film using electron cyclotron resonance plasmas
Chakraborty, Rabindra Nath
Text (1995)
Part of
Electronic Theses & Dissertations
The new generation microwave plasma assisted CVD reactor for diamond synthesis
Gu, Yajun
Text (2011)
Part of
Electronic Theses & Dissertations
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