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Subject: Cyclotron resonance
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Subject: Plasma etching
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Electronic Theses & Dissertations
3
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Theses
3
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English
3
Subject
Anisotropy
1
Microwave plasmas
1
Silicon
2
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An investigation of anisotropic etching of silicon in an electron cyclotron resonance plasma
Musson, Brian David
Text (1991)
Part of
Electronic Theses & Dissertations
Macroscopic properties of a multipolar electron cyclotron resonance microwave-cavity plasma source for anisotropic silicon etching
Hopwood, Jeffrey Alan
Text (1990)
Part of
Electronic Theses & Dissertations
An experimental evaluation of a 12.5-cm diameter multipolar microwave electron cyclotron resonance plasma source
Mak, Peng Un
Text (1997)
Part of
Electronic Theses & Dissertations
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