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Collection: Electronic Theses & Dissertations
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Degree Level: Doctoral
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Subject: Cyclotron resonance
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Material Type
Theses
6
Language
English
6
Copyright Status
In Copyright
6
Subject
Electrons
1
Ion sources
2
Microwave measurements
1
Microwave plasmas
2
Microwaves
2
Plasma (Ionized gases)
2
Plasma dynamics
1
Plasma etching
2
Silicon
1
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Design and experimental investigation of a large diameter electron cyclotron resonant plasma source
Sze, Fan Cheung
Text (1993)
Part of
Electronic Theses & Dissertations
Macroscopic properties of a multipolar electron cyclotron resonance microwave-cavity plasma source for anisotropic silicon etching
Hopwood, Jeffrey Alan
Text (1990)
Part of
Electronic Theses & Dissertations
Temperature and concentration of ionic and neutral species in resonant microwave cavity plasma discharges
King, Gregory Louis
Text (1994)
Part of
Electronic Theses & Dissertations
3D3V simulation of electron cyclotron resonance plasmas
Gopinath, Venkatesh P.
Text (1994)
Part of
Electronic Theses & Dissertations
An experimental evaluation of a 12.5-cm diameter multipolar microwave electron cyclotron resonance plasma source
Mak, Peng Un
Text (1997)
Part of
Electronic Theses & Dissertations
Development of a microwave ion and plasma source immersed in a multicusp electron cyclotron resonant magnetic field
Dahimene, Mahmoud
Text (1987)
Part of
Electronic Theses & Dissertations
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