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Showing 1 to 7 of 7 results
Design and experimental investigation of a large diameter electron cyclotron resonant plasma source
Design and experimental investigation of a large diameter electron cyclotron resonant plasma source
Sze, Fan Cheung
Text (1993)
Part of Electronic Theses & Dissertations
In Copyright
Implementation and testing of a laser induced fluorescence system for the characterization of a multipolar electron cyclotron resonance plasma reactor
Implementation and testing of a laser induced fluorescence system for the characterization of a multipolar electron cyclotron resonance plasma reactor
King, Gregory Louis
Text (1991)
Part of Electronic Theses & Dissertations
In Copyright
3D3V simulation of electron cyclotron resonance plasmas
3D3V simulation of electron cyclotron resonance plasmas
Gopinath, Venkatesh P.
Text (1994)
Part of Electronic Theses & Dissertations
In Copyright
Temperature and concentration of ionic and neutral species in resonant microwave cavity plasma discharges
Temperature and concentration of ionic and neutral species in resonant microwave cavity plasma discharges
King, Gregory Louis
Text (1994)
Part of Electronic Theses & Dissertations
In Copyright
An investigation of anisotropic etching of silicon in an electron cyclotron resonance plasma
An investigation of anisotropic etching of silicon in an electron cyclotron resonance plasma
Musson, Brian David
Text (1991)
Part of Electronic Theses & Dissertations
In Copyright
Macroscopic properties of a multipolar electron cyclotron resonance microwave-cavity plasma source for anisotropic silicon etching
Macroscopic properties of a multipolar electron cyclotron resonance microwave-cavity plasma source for anisotropic silicon etching
Hopwood, Jeffrey Alan
Text (1990)
Part of Electronic Theses & Dissertations
In Copyright
An experimental evaluation of a 12.5-cm diameter multipolar microwave electron cyclotron resonance plasma source
An experimental evaluation of a 12.5-cm diameter multipolar microwave electron cyclotron resonance plasma source
Mak, Peng Un
Text (1997)
Part of Electronic Theses & Dissertations
In Copyright