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Design and experimental investigation of a large diameter electron cyclotron resonant plasma source

Design and experimental investigation of a large diameter electron cyclotron resonant plasma source

Sze, Fan Cheung

Text (1993)

Part of Electronic Theses & Dissertations

Macroscopic properties of a multipolar electron cyclotron resonance microwave-cavity plasma source for anisotropic silicon etching

Macroscopic properties of a multipolar electron cyclotron resonance microwave-cavity plasma source for anisotropic silicon etching

Hopwood, Jeffrey Alan

Text (1990)

Part of Electronic Theses & Dissertations

Temperature and concentration of ionic and neutral species in resonant microwave cavity plasma discharges

Temperature and concentration of ionic and neutral species in resonant microwave cavity plasma discharges

King, Gregory Louis

Text (1994)

Part of Electronic Theses & Dissertations

3D3V simulation of electron cyclotron resonance plasmas

3D3V simulation of electron cyclotron resonance plasmas

Gopinath, Venkatesh P.

Text (1994)

Part of Electronic Theses & Dissertations

An experimental evaluation of a 12.5-cm diameter multipolar microwave electron cyclotron resonance plasma source

An experimental evaluation of a 12.5-cm diameter multipolar microwave electron cyclotron resonance plasma source

Text (1997)

Part of Electronic Theses & Dissertations

Development of a microwave ion and plasma source immersed in a multicusp electron cyclotron resonant magnetic field

Development of a microwave ion and plasma source immersed in a multicusp electron cyclotron resonant magnetic field

Dahimene, Mahmoud

Text (1987)

Part of Electronic Theses & Dissertations