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Subject: Microwave plasmas
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Subject: Plasma etching
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Collection: Electronic Theses & Dissertations
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Material Type
Theses
3
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English
3
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In Copyright
3
Subject
Cyclotron resonance
1
Diamonds
2
Plasma etching
3
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Experimental development of microwave cavity plasma reactors for large area and high rate diamond film deposition
Zhang, Jie
Text (1993)
Part of
Electronic Theses & Dissertations
Post-depositional processing of diamond film using electron cyclotron resonance plasmas
Chakraborty, Rabindra Nath
Text (1995)
Part of
Electronic Theses & Dissertations
An experimental evaluation of a 12.5-cm diameter multipolar microwave electron cyclotron resonance plasma source
Mak, Peng Un
Text (1997)
Part of
Electronic Theses & Dissertations
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