MSU Libraries
Digital Repository
Home
About
Collections
Selected facets
Subject: Microwave plasmas
×
Subject: Plasma etching
×
Copyright Status: In Copyright
×
Collection
Electronic Theses & Dissertations
3
Material Type
Theses
3
Language
English
3
Subject
Cyclotron resonance
1
Diamonds
2
Plasma etching
3
Search results
Showing 1 to 3 of 3 results
Results per page
20
50
100
Sort by
Most Relevant
Title (A-Z)
Title (Z-A)
Date (Newest)
Date (Oldest)
Most Recent
Least Relevant
Experimental development of microwave cavity plasma reactors for large area and high rate diamond film deposition
Zhang, Jie
Text (1993)
Part of
Electronic Theses & Dissertations
Post-depositional processing of diamond film using electron cyclotron resonance plasmas
Chakraborty, Rabindra Nath
Text (1995)
Part of
Electronic Theses & Dissertations
An experimental evaluation of a 12.5-cm diameter multipolar microwave electron cyclotron resonance plasma source
Mak, Peng Un
Text (1997)
Part of
Electronic Theses & Dissertations
First
1
(current)
Last