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Material Type: Theses
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Program of Study: Electrical Engineering
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Subject: Plasma etching
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Electronic Theses & Dissertations
5
Language
English
5
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In Copyright
5
Subject
Anisotropy
1
Cyclotron resonance
3
Diamonds
2
Microwave plasmas
3
Silicon
2
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Experimental development of microwave cavity plasma reactors for large area and high rate diamond film deposition
Zhang, Jie
Text (1993)
Part of
Electronic Theses & Dissertations
An investigation of anisotropic etching of silicon in an electron cyclotron resonance plasma
Musson, Brian David
Text (1991)
Part of
Electronic Theses & Dissertations
Macroscopic properties of a multipolar electron cyclotron resonance microwave-cavity plasma source for anisotropic silicon etching
Hopwood, Jeffrey Alan
Text (1990)
Part of
Electronic Theses & Dissertations
Post-depositional processing of diamond film using electron cyclotron resonance plasmas
Chakraborty, Rabindra Nath
Text (1995)
Part of
Electronic Theses & Dissertations
An experimental evaluation of a 12.5-cm diameter multipolar microwave electron cyclotron resonance plasma source
Mak, Peng Un
Text (1997)
Part of
Electronic Theses & Dissertations
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