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Experimental development of microwave cavity plasma reactors for large area and high rate diamond film deposition

Experimental development of microwave cavity plasma reactors for large area and high rate diamond film deposition

Text (1993)

Part of Electronic Theses & Dissertations

An investigation of anisotropic etching of silicon in an electron cyclotron resonance plasma

An investigation of anisotropic etching of silicon in an electron cyclotron resonance plasma

Musson, Brian David

Text (1991)

Part of Electronic Theses & Dissertations

Post-depositional processing of diamond film using electron cyclotron resonance plasmas

Post-depositional processing of diamond film using electron cyclotron resonance plasmas

Chakraborty, Rabindra Nath

Text (1995)

Part of Electronic Theses & Dissertations

Macroscopic properties of a multipolar electron cyclotron resonance microwave-cavity plasma source for anisotropic silicon etching

Macroscopic properties of a multipolar electron cyclotron resonance microwave-cavity plasma source for anisotropic silicon etching

Hopwood, Jeffrey Alan

Text (1990)

Part of Electronic Theses & Dissertations

An experimental evaluation of a 12.5-cm diameter multipolar microwave electron cyclotron resonance plasma source

An experimental evaluation of a 12.5-cm diameter multipolar microwave electron cyclotron resonance plasma source

Text (1997)

Part of Electronic Theses & Dissertations